XY200M Plataforma piezoeléctrica

The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.

Performance:

• Max No-load displacement (µm): 200
• Dimensions (mm): 22 x 100 x 100
• Resolution (nm): 2.0
• Unloaded resonance frequency (Hz): 580

Opciones disponibles:

• Strain Gauges
• Vacuum
• Eddy current sensor