XYZ200M Plataforma piezoeléctrica

The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection

Performance:

• Max displacement (µm): 180
• Height (mm): 44
• Dimensions (mm): 100 x 100
• Resolution (nm): 1.8
• Unloaded resonance frequency (Hz): 380
• Response time (ms): 1.32 

Opciones disponibles:

• Strain Gauges
• Vacuum
• Eddy current sensor